60 lines
3.3 KiB
Markdown
60 lines
3.3 KiB
Markdown
# TA521_CLEAN
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**equipment module**
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unit: [TA521](../units/TA521.md)
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recipe phase: [CLEAN](../recipe-phases/CLEAN.md)
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| property | value |
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|------------------------------------------|----------------------|
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| UniqueName | TA521_CLEAN |
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| RecipePhase | CLEAN |
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| EquipmentPhaseType | TAGPHASE |
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| UniqueID | 39 |
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| MaxOwners | 1 |
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| UploadDownloadFlags | 3 |
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| CreateParameterLimitTag | false |
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| CreateReportLimitTag | false |
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| OnControlScanRate | 1000 |
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| OffControlScanRate | 60000 |
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## control
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|name |id |type |engineering units|Server |Path |Address | opc |
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|--------------------|-----|-----------|-----------------|--------------------|--------------------|--------------------|-----------------|
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|ControlTagRequest |Request|Integer | |sigyl |sigyl.dk400.phases |TA521_CLEAN.RQ |N26:330
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|ControlTagCommand |Command|Integer | |sigyl |sigyl.dk400.phases |TA521_CLEAN.OC |N21:33
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|ControlTagFailure |Failure|Integer | |sigyl |sigyl.dk400.phases |TA521_CLEAN.F |N25:33
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|ControlTagOwner |Owner|Integer | |sigyl |sigyl.dk400.phases |TA521_CLEAN.W |N27:33/3
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|ControlTagPause |Pause|Integer | |sigyl |sigyl.dk400.phases |TA521_CLEAN.P |N27:33/4
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|ControlTagPaused |Paused|Integer | |sigyl |sigyl.dk400.phases |TA521_CLEAN.PD |N27:33/5
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|ControlTagSingleStep|SingleStep|Integer | |sigyl |sigyl.dk400.phases |TA521_CLEAN.SS |N27:33/2
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|ControlTagStatus |Status|Integer | |sigyl |sigyl.dk400.phases |TA521_CLEAN.ST |N24:33
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|ControlTagStepIndex |StepIndex|Integer | |sigyl |sigyl.dk400.phases |TA521_CLEAN.SI |N32:33
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|ControlTagUnit |Unit |Integer | |sigyl |sigyl.dk400.phases |TA521_CLEAN.UN |N23:33
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## requests
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none
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## parameters
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|name |id |type |engineering units|Server |Path |Address | opc |
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|--------------------|-----|-----------|-----------------|--------------------|--------------------|--------------------|-----------------|
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|CLEANING_CODE |1 |String |ENG. UNITS |sigyl |sigyl.dk400.phases |TA521_CLEAN.P01 |ST101:100
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|CLEANING_STRENGTH |2 |Real |ENG. UNITS |sigyl |sigyl.dk400.phases |TA521_CLEAN.P02 |F103:55
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## reports
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none
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## sequence
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* undefined
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## operations
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* [ALL_CLEAN](../operations/ALL_CLEAN.md)
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