60 lines
3.3 KiB
Markdown
60 lines
3.3 KiB
Markdown
# TA522_CLEAN
|
|
|
|
**equipment module**
|
|
|
|
unit: [TA522](../units/TA522.md)
|
|
|
|
recipe phase: [CLEAN](../recipe-phases/CLEAN.md)
|
|
|
|
| property | value |
|
|
|------------------------------------------|----------------------|
|
|
| UniqueName | TA522_CLEAN |
|
|
| RecipePhase | CLEAN |
|
|
| EquipmentPhaseType | TAGPHASE |
|
|
| UniqueID | 33 |
|
|
| MaxOwners | 1 |
|
|
| UploadDownloadFlags | 3 |
|
|
| CreateParameterLimitTag | false |
|
|
| CreateReportLimitTag | false |
|
|
| OnControlScanRate | 1000 |
|
|
| OffControlScanRate | 60000 |
|
|
|
|
|
|
## control
|
|
|
|
|name |id |type |engineering units|Server |Path |Address | opc |
|
|
|--------------------|-----|-----------|-----------------|--------------------|--------------------|--------------------|-----------------|
|
|
|ControlTagRequest |Request|Integer | |sigyl |sigyl.dk400.phases |TA522_CLEAN.RQ |N26:340
|
|
|ControlTagCommand |Command|Integer | |sigyl |sigyl.dk400.phases |TA522_CLEAN.OC |N21:34
|
|
|ControlTagFailure |Failure|Integer | |sigyl |sigyl.dk400.phases |TA522_CLEAN.F |N25:34
|
|
|ControlTagOwner |Owner|Integer | |sigyl |sigyl.dk400.phases |TA522_CLEAN.W |N27:34/3
|
|
|ControlTagPause |Pause|Integer | |sigyl |sigyl.dk400.phases |TA522_CLEAN.P |N27:34/4
|
|
|ControlTagPaused |Paused|Integer | |sigyl |sigyl.dk400.phases |TA522_CLEAN.PD |N27:34/5
|
|
|ControlTagSingleStep|SingleStep|Integer | |sigyl |sigyl.dk400.phases |TA522_CLEAN.SS |N27:34/2
|
|
|ControlTagStatus |Status|Integer | |sigyl |sigyl.dk400.phases |TA522_CLEAN.ST |N24:34
|
|
|ControlTagStepIndex |StepIndex|Integer | |sigyl |sigyl.dk400.phases |TA522_CLEAN.SI |N32:34
|
|
|ControlTagUnit |Unit |Integer | |sigyl |sigyl.dk400.phases |TA522_CLEAN.UN |N23:34
|
|
|
|
## requests
|
|
|
|
none
|
|
|
|
## parameters
|
|
|
|
|name |id |type |engineering units|Server |Path |Address | opc |
|
|
|--------------------|-----|-----------|-----------------|--------------------|--------------------|--------------------|-----------------|
|
|
|CLEANING_CODE |1 |String |ENG. UNITS |sigyl |sigyl.dk400.phases |TA522_CLEAN.P01 |ST101:105
|
|
|CLEANING_STRENGTH |2 |Real |ENG. UNITS |sigyl |sigyl.dk400.phases |TA522_CLEAN.P02 |F103:56
|
|
|
|
## reports
|
|
|
|
none
|
|
|
|
## sequence
|
|
|
|
* undefined
|
|
|
|
## operations
|
|
|
|
* [ALL_CLEAN](../operations/ALL_CLEAN.md)
|