batch-example-2/document/equipment-modules/DR540_EP_PLENUM_DRY.md

3.3 KiB

DR540_EP_PLENUM_DRY

equipment module

unit: DR540

recipe phase: EP_PLENUM_DRY

property value
UniqueName DR540_EP_PLENUM_DRY
RecipePhase EP_PLENUM_DRY
EquipmentPhaseType TAGPHASE
UniqueID 106
MaxOwners 1
UploadDownloadFlags 0
CreateParameterLimitTag false
CreateReportLimitTag false
OnControlScanRate 1000
OffControlScanRate 60000

control

name id type engineering units Server Path Address opc
ControlTagRequest Request Integer InstructionBasedServer INSTRUCTIONS DR540_EP_PLENUM_DRY.RQ
ControlTagCommand Command Integer InstructionBasedServer INSTRUCTIONS DR540_EP_PLENUM_DRY.OC
ControlTagFailure Failure Integer InstructionBasedServer INSTRUCTIONS DR540_EP_PLENUM_DRY.F
ControlTagOwner Owner Integer InstructionBasedServer INSTRUCTIONS DR540_EP_PLENUM_DRY.W
ControlTagPause Pause Integer InstructionBasedServer INSTRUCTIONS DR540_EP_PLENUM_DRY.P
ControlTagPaused Paused Integer InstructionBasedServer INSTRUCTIONS DR540_EP_PLENUM_DRY.PD
ControlTagSingleStep SingleStep Integer InstructionBasedServer INSTRUCTIONS DR540_EP_PLENUM_DRY.SS
ControlTagStatus Status Integer InstructionBasedServer INSTRUCTIONS DR540_EP_PLENUM_DRY.ST
ControlTagStepIndex StepIndex Integer InstructionBasedServer INSTRUCTIONS DR540_EP_PLENUM_DRY.SI
ControlTagUnit Unit Integer InstructionBasedServer INSTRUCTIONS DR540_EP_PLENUM_DRY.UN

requests

name id type engineering units Server Path Address opc
REQUEST00 0 Integer InstructionBasedServer INSTRUCTIONS DR540_EP_PLENUM_DRY.Q01
REQUEST01 1 Integer InstructionBasedServer INSTRUCTIONS DR540_EP_PLENUM_DRY.Q02

parameters

none

reports

none

operations